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Ultrasonic Megasonic Cleaning Equipment for Semiconductor Wafers

Sonosys's ultrasonic cleaning solves the challenges of wafer cleaning.

In the semiconductor industry, particularly in wafer manufacturing, the removal of fine foreign substances and residues is a critical issue that affects product quality. Even slight contamination on the wafer surface can lead to decreased device performance and lower yields. Sonosys's ultrasonic megasonic cleaning equipment addresses these challenges by achieving high cleaning power and uniform cleaning, contributing to quality improvement in wafer manufacturing. 【Usage Scenarios】 - Removal of foreign substances in the wafer manufacturing process - Cleaning of precision parts - Rinsing process after chemical cleaning 【Benefits of Implementation】 - Reduction in cleaning time - Improvement in cleaning quality - Enhancement of yield

  • Triple-nozzle-ecf5619c.jpg
  • 超音波洗浄装置(バス・タンク式).jpeg
  • Zerstäuber-Demo.jpg
  • Ultrasonic Cleaner
  • Ultrasonic Oscillator
  • Ultrasonic cleaner
  • Sonic Cleaning Machine

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